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T. Götsch, W. Wallisch, M. Stöger-Pollach, B. Klötzer, S. Penner:
"From zirconia to yttria: Sampling the YSZ phase diagram using sputter-deposited thin films";
AIP Advances, 6 (2016), 025119.

Yttria-stabilized zirconia (YSZ) thin films with varying composition between 3 mol%
and 40 mol% have been prepared by direct-current ion beam sputtering at a substrate
temperature of 300 ◦C, with ideal transfer of the stoichiometry from the target to
the thin film and a high degree of homogeneity, as determined by X-ray photoelectron
and energy-dispersive X-ray spectroscopy. The films were analyzed using
transmission electron microscopy, revealing that, while the films with 8 mol% and
20 mol% yttria retain their crystal structure from the bulk compound (tetragonal
and cubic, respectively), those with 3 mol% and 40 mol% Y2O3 undergo a phase
transition upon sputtering (from a tetragonal/monoclinic mixture to purely tetragonal
YSZ, and from a rhombohedral structure to a cubic one, respectively). Selected
area electron diffraction shows a strong texturing for the three samples with lower
yttria-content, while the one with 40 mol% Y2O3 is fully disordered, owing to
the phase transition. Additionally, AFM topology images show somewhat similar
structures up to 20 mol% yttria, while the specimen with the highest amount of
dopant features a lower roughness. In order to facilitate the discussion of the
phases present for each sample, a thorough review of previously published phase
diagrams is presented. C 2016 Author(s). All article content, except where otherwise
noted, is licensed under a Creative Commons Attribution (CC BY) license

http://dx.doi.org/10.1063/1.4942818